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Next-generation lithography
Results: 17

#	Item
11	T404-medea+ (LO1[removed]:14 Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:13 Extreme ultraviolet Ultraviolet Next-generation lithography Physics Extreme ultraviolet lithography Microtechnology Photolithography
12	PROJECT RESULT Lithography T404: Extreme UV lithography masks (EXTUMASK) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:39:55 Ultraviolet Extreme ultraviolet Mask 45 nanometer Microtechnology Multiple patterning Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photomask
13	PROJECT PROFILE T409: Development and proof of concept for projection mask-less lithography (Projection-ML2) HIGH-SPEED Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:20 Photolithography Extreme ultraviolet lithography Nanolithography Microelectromechanical systems Lithography 45 nanometer SEMATECH Next-generation lithography Materials science Technology Microtechnology
14	Executive Briefing: Getting Direct On Litho Posted on: October 17th, [removed]Posted by : Mark LaPedus One-on-one with David Lam about next-generation lithography, where he’s placing his bets, and what’s changing in th Add to Reading List Source URL: www.multibeamcorp.com Language: English - Date: 2014-06-26 13:05:59 Semiconductor device fabrication Next-generation lithography Electron beam lithography Photolithography Visual arts Multiple patterning Nanoimprint lithography Lithography Wafer Technology Microtechnology Maskless lithography
15	Microsoft PowerPoint - Electron-Beam and X-Ray Lithography.ppt Add to Reading List Source URL: www.ece.umd.edu Language: English - Date: 2007-12-07 18:05:09 Microtechnology Photolithography X-ray lithography Electron beam lithography Lithography Resist Photoresist Next-generation lithography Nanolithography Materials science Technology Semiconductor device fabrication
16	Microsoft PowerPoint - BEUV Dublin1.3ho .ppt Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2010-12-02 11:22:35 22 nanometer 16 nanometer Ultraviolet Extreme ultraviolet 32 nanometer Multiple patterning 11 nanometer Angular resolution Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photolithography
17	PDF Document Add to Reading List Source URL: cm.bell-labs.com Language: English - Date: 1999-12-16 12:41:13 Photolithography Electron beam lithography Resist Next-generation lithography Resolution enhancement technologies Lithography Proximity effect Computational lithography Materials science Technology Microtechnology

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